Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent
出版日期:2005-12-01 00:00:00
著者:Lo, Shih-shou; Chiu, Hua-kung; Chen, Chii-chang; Hsu Shih-chieh; Liu, Cheng-yi
單位:淡江大學化學工程與材料工程學系
出版者:IEEE Photonics Society
著錄名稱、卷期、頁數:Photonics Technology Letters 17(12), pp.2592-2594
摘要:This work explicates a method for fabricating a hollow optical waveguide. Dilute KOH solvent was used to bond two omni-directional reflector (ODR) Si wafers to an amorphous Si thin film on the top of a Si wafer. The resultant bonding interface is very thin, with a thickness that is close to that of a SiO2 layer in the ODR substrate. Therefore, the far field image reveals that light is strongly confined in the hollow optical waveguide.
語言:en
ISSN:1041-1135
期刊性質:國內
審稿制度:否
國別:TWN
出版型式:電子版